Resolution Enhancement Techniques in Optical Lithography

Resolution Enhancement Techniques in Optical Lithography

Hardback Published on: 28/02/2004
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Publisher information

  • Publisher: SPIE Press
  • ISBN: 9780819451668
  • Number of pages: 900
  • Dimensions: 283 x 220 x 53 mm
  • Weight: 2265g
  • Languages: English

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