Radio Frequency Sputtering

Radio Frequency Sputtering: Thin-Film Deposition and Device Applications

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Hardback Published on: 14/10/2026
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Published 14/10/2026
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Published 14/10/2026
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Publisher information

  • Publisher: Wiley-VCH Verlag GmbH
  • ISBN: 9783527356225
  • Number of pages: 432
  • Dimensions: 244 x 170 mm
  • Languages: English

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