Predictive Simulation of Semiconductor Processing

Predictive Simulation of Semiconductor Processing: Status and Challenges

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Hardback Published on: 05/05/2004
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Publisher information

  • Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
  • ISBN: 9783540204817
  • Number of pages: 490
  • Dimensions: 235 x 155 mm
  • Languages: English

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