Optical Microlithography XXV

Optical Microlithography XXV: 13-16 February 2012, San Jose, California, United States

Paperback Published on: 30/07/2012
£185
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Publisher information

  • Publisher: SPIE Press
  • ISBN: 9780819489821
  • Number of pages: 946
  • Dimensions: 229 x 152 mm

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