Lithography
Hardback Published on: 19/11/2010
Price: £146.95
Synopsis
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Publisher information
- Publisher: ISTE Ltd and John Wiley & Sons Inc
- ISBN: 9781848212022
- Number of pages: 320
- Dimensions: 241 x 163 x 29 mm
- Weight: 730g
- Languages: English