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Laser-Assisted Microtechnology

Simeon M. Metev (author), Vadim P. Veiko (author)

Paperback Published on: 31/07/2012

£72.00

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Synopsis

Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.