Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101

Laser and Particle-Beam Chemical Processing for Microelectronics: Volume 101

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Paperback Published on: 05/06/2014
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Synopsis

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Publisher information

  • Publisher: Cambridge University Press
  • ISBN: 9781107411043
  • Dimensions: 229 x 152 x 27 mm
  • Weight: 710g

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