Gettering and Defect Engineering in Semiconductor Technology VII

Gettering and Defect Engineering in Semiconductor Technology VII

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Paperback Published on: 25/07/1997
£230
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Synopsis

Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques remain of key importance in enhancing the device yield.

Publisher information

  • Publisher: Trans Tech Publications Ltd
  • ISBN: 9783908450276
  • Number of pages: 556
  • Dimensions: 240 x 170 x 28 mm
  • Weight: 1100g
  • Languages: English

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