
Fabrication Engineer
Synopsis
In the education area, Professor Campbell leads the University of Minnesota's participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience Microelectronic Fabrication and created the text book as a result. Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, this fourth
edition of Fabrication Engineering at the Micro- and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. The text covers the entire basic unit
processes used to fabricate integrated circuits and other devices.
Publisher information
- Publisher: Oxford University Press
- ISBN: 9780199861217
- Number of pages: 82
