Cryopumping

In recent years the importance of cryopumping, the production of a vacuum through the use of low temperatures, has increased greatly. This is a result on the one hand of new areas of use, and on the other of increased demands in many vacuum procedures for ultra-clean gas atmospheres, low final pressures and high specific pumping speeds. This book is an attempt to provide a comprehensive account of cryopumping, covering the physical theory, practical techniques and applications of cryopumping, as well as recent developments which have resulted in pumps that are safe in operation, allow full automation and are superior to conventional pumps.