Advanced Etch Technology for Nanopatterning

Advanced Etch Technology for Nanopatterning: 13-14 February 2012, San Jose, California, United States

Paperback Published on: 01/01/2012
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Publisher information

  • Publisher: SPIE Press
  • ISBN: 9780819489845
  • Number of pages: 224
  • Dimensions: 229 x 152 mm
  • Languages: English

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